Field Emission Scanning Electron Microscope (FESEM) has great capabilities to observe, measure, analyze, and manipulate nanoscale objects. Our institute has ultra-high resolution Carl Zeiss FESEM (LEO 1530 VP) equipped with energy dispersive X-ray spectrometer (EDS) detector. Our FESEM is also integrated with JC Nabity nanolithography system and perform e-beam nano-patterning. With the unique combination of GEMINI ultra-high performance electron optics and variable pressure technology, the FESEM delivers a range of applications for different materials, such as , such as semiconductive, geological, biological, and composite materials, at nanoscale.
Specifications and capabilities of FESEM(LEO 1530 VP)
- Schottky thermal emitter with ultra-high resolution (1 nm at 20 kV, and 2.5 nm at 1 kV)
- Annular In-Lens SE detector and lateral SE detector with patented GEMIN lens
- Elements analysis by OXFORD EDS (Point, line, and area EDS analysis as well EDS mapping)
- x/y/z axes motorized stage allowing up to 45掳 of tilt
- JC Nabity e-beam nano-patterning system
- Manipulation nano-scale objects and in-situ measurement by micro probes
User Rates
Rates will be based on an hourly or per sample basis and will be decided after consultation with the customer.
Internal rate: $40/hr.*
External rate: $70/hr.
Training: $50/hr.
Consumables charged at cost.
Contact Us
Dr. Weilie Zhou
Email: wzhou@uno.edu
Sample Data
